个人简历

1995年毕业于郑州大学电子工程系，获学士学位。2003年7月在中国科学院半导体研究所毕业获博士学位，同年进入中科院半导体研究所集成技术中心工作至今，一直从事新型半导体微电子器件和MEMS（微机电系统）器件的研究工作。

研究领域

• 基于谐振机理工作的RF MEMS器件，如谐振器和滤波器

• MEMS 陀螺仪

• SiC 器件

对外服务

• 承接Si基和SOI基MEMS器件的流程加工。

• 负责安捷伦LPCVD的管理和工艺服务。

成果出版

1. 康中波，韩国威，司朝伟，钟卫威，赵永梅，宁瑾，基于谐振原理的RF MEMS滤波器的研制，微纳电子技术，Vol49., No.7, July. , 2012, pp467-470

2. Chaowei Si,  Guowei Han,  Jin Ning, Weiwei Zhong,  Fuhua Yang., “Quality factor optimization techniques for MEMS gyroscopes of frame structures ”. Advanced Materials Research, Vol 590 (2012) 

3. G.W. Han, C.W. Si, J. Ning, W.W. Zhong, Y.M. Zhao, G.S. Sun, F.H. Yang, "Feed-through cancellation of MEMS filter using difference method and analysis of the induced notch", JOURNAL OF SEMICONDUCTORS, accepted.

4. Zhao Yongmei, Sun Guosheng, Ning Jin, Liu Xingfang, Zhao Wanshun, Wanglei, Li Jinmin , “Doped Polycrystalline 3C-SiC Films Deposited by LPCVD for Radio-Frequency MEMS Applications”, Chinese Physics Letters, 2008, Vol.25, No.6, PP.2269-2272

5. Wangliang, Zhao Yongmei, Ning Jin, Sun Guosheng, Wanglei, Liu Xingfang, Zhao Wanshun, Zeng Yiping, and Li Jinmin, “Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures”, JOURNAL OF SEMICONDUCTORS, Vol.29, No.8, Aug., 2008, pp1453-1456

中国专利：

1. 司朝伟，韩国威，宁瑾，刘晓东，基于寄生电容调节的高精度温度补偿MEMS振荡器，申请号：201210051847.3

2. 宁瑾, 李永梅, 韩国威, 杨富华，基于谐振原理工作的MEMS滤波器模块              ，申请号：201010534603.1

3. 王亮, 宁瑾, 孙国胜, 王雷, 赵万顺, 赵永梅, 刘兴�, 多晶立方相碳化硅微机电系统谐振器件及其制作方法, 授权号： ZL.200710178327.8

学术会议

1. Yongmei Zhao, Jin Ning, Guosheng Sun, Xingfang Liu, Liang Wangk, Gang Ji, Lei Wang, Wanshun Zhao, Jinmin Li, Fuhua Yang, “Simulation and fabrication of the SiC-based clamped-clamped filter”, 2008, 9th International Conference on Solid-State and Integrated-Circuit Technology, pp2532-2535

2. Chaowei Si, Guowei Han, Jin Ning, Weiwei Zhong, Fuhua Yang. “Design of a MEMS resonant wind sensor on airplane wing”. 3rd International Conference of the Chinese Society of Micro-Nano Technology, Hangzhou, China, Nov., 2012 

3. G.W. Han, C.W. Si, J. Ning, Y.M. Zhao, G.S. Sun, F.H. Yang,"Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram", 2nd Micro Nano Devices, Structure and Computing Systems, accepted (2013).