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索书号 503/Y11
Contributors List xiii
Preface xv
Acknowledgments xix
1. Overview of Atomic Force Microscopy 1
Dalia G. Yablon
1.1 A Word on Nomenclature 2
1.2 Atomic Force Microscopy—The Appeal to Industrial R&D 2
1.3 Mechanical Properties 5
1.4 Overview of AFM Operation 6
1.5 Nanomechanical Methods Surveyed in Book 11
1.6 Industries Represented 13
Acknowledgments 14
References 14
2. Understanding the Tip–Sample Contact: An Overview of Contact Mechanics from the Macro- to the Nanoscale 15
Tevis D. B. Jacobs, C. Mathew Mate, Kevin T. Turner, and Robert W. Carpick
2.1 Hertz Equations for Elastic Contact 15
2.2 Adhesive Contacts 22
2.3 Further Extensions of Continuum Contact Mechanics Models 29
2.4 Thin Films 34
2.5 Tangential Forces 37
2.6 Application of Continuum Mechanics to Nanoscale Contacts 42
Acknowledgments 44
Appendix 2A Surface Energy and Work of Adhesion 44
References 45
3. Understanding Surface Forces Using Static and Dynamic Approach–Retraction Curves 49
Sudharsan Balasubramaniam, Daniel Kiracofe, and Arvind Raman
3.1 Tip–Sample Interaction Forces 53
3.2 Static F–Z Curves 58
3.3 Dynamic Amplitude/Phase–Distance Curves 69
3.4 Brief Guide to VEDA Simulations 78
3.5 Conclusions 90
Glossary 91
References 93
4. Phase Imaging 95
Dalia G. Yablon and Greg Haugstad
4.1 Introduction 95
4.2 Bistability: Attractive and Repulsive Mode 97
4.3 Complications in Phase Quantification 107
References 113
5. Dynamic Contact AFM Methods for Nanomechanical Properties 115
Donna C. Hurley and Jason P. Killgore
5.1 Introduction 115
5.2 Force Modulation Microscopy (FMM) 121
5.3 Contact Resonance (CR) Techniques 125
5.4 Comparison of FMM and CR-FM 136
5.5 Other Dynamic Contact Approaches 138
5.6 Summary and Conclusions 140
Acknowledgments 141
Appendix 5A Data Analysis Procedure for Contact Resonance Spectroscopy Measurements 141
References 145
6. Guide to Best Practices for AFM Users 150
Greg Haugstad
6.1 Force–Distance Measurements—Instrumental Sources of Nonideality 151
6.2 Force–Distance Measurements—Physical Sources of Nonideality 157
References 161
7. Nanoindentation Measurements of Mechanical Properties of Very Thin Films and Nanostructured Materials at High Spatial Resolution 162
Steve J. Bull
7.1 Introduction 162
7.2 Bulk Materials 163
7.3 Coatings 176
7.4 Conclusions 188
Acknowledgments 188
References 188
8. Scanning Probe Microscopy for Critical Measurements in the Semiconductor Industry 190
Johann Foucher
8.1 Introduction 190
8.2 Critical Dimension in the Semiconductor Industry 191
8.3 CD Metrology Techniques for Production 192
8.4 Obtaining Accurate CD in the Semiconductor Industry 194
8.5 Hybrid Metrology as a Final Solution to Overcome CD-AFM, CD-SEM, and Scatterometry Intrinsic Limitations 203
8.6 Conclusion 208
References 208
9. Atomic Force Microscopy of Polymers 210
Andy H. Tsou and Dalia G. Yablon
9.1 Introduction 210
9.2 Tapping Phase AFM 213
9.3 Nanoindentation 217
9.4 Force Modulation 218
9.5 Pulsed Force Imaging 219
9.6 Force–Volume AFM 220
9.7 HarmoniX and Peak Force QNM Imaging 222
9.8 Summary 227
References 229
10. Unraveling Links between Food Structure and Function with Probe Microscopy 232
A. Patrick Gunning and Victor J. Morris
10.1 Introduction 232
10.2 Gels and Thickeners: Molecular Networks 236
10.3 Emulsions and Foams: Protein–Surfactant Competition 238
10.4 Interfacial Structure and Digestion: Designer Interfaces 241
10.5 Force Spectroscopy: Model Emulsions 244
10.6 Force Spectroscopy: Origins of Bioactivity 247
10.7 Conclusions 248
References 249
11. Microcantilever Sensors for Petrochemical Applications 251
Alan M. Schilowitz
11.1 Introduction 251
11.2 Background 252
11.3 Applications 257
11.4 Conclusion 266
References 267
12. Applications of Scanning Probe Methods in Cosmetic Science 270
Gustavo S. Luengo and Anthony Galliano
12.1 Introduction 270
12.2 Substrates of Cosmetics 271
12.3 Mechanical Properties and Modifications by Cosmetic Products 274
12.4 Scanning Probe Technologies Adapted to Cosmetic Science 275
12.5 Conclusions 285
References 285
13. Applications of Scanning Probe Microscopy and Nanomechanical Analysis in Pharmaceutical Development 287
Matthew S. Lamm
13.1 Introduction 287
13.2 Applications of SPM Imaging 288
13.3 SPM as a Screening Tool 291
13.4 Applications of Nanoindentation 293
13.5 Conclusion 299
Acknowledgments 299
References 300
14. Comparative Nanomechanical Study of Multiharmonic Force Microscopy and Nanoindentation on Low Dielectric Constant Materials 302
Katharine Walz, Robin King, Willi Volksen, Geraud Dubois, Jane Frommer, and Kumar Virwani
14.1 Introduction 302
14.2 Experimental 308
14.3 Results and Discussions 311
14.4 Conclusions 319
Acknowledgments 320
References 320
15. Nanomechanical Characterization of Biomaterial Surfaces: Polymer Coatings That Elute Drugs 323
Klaus Wormuth and Greg Haugstad
15.1 Introduction 323
15.2 Materials and Methods 325
15.3 Dexamethasone in PBMA or PBMA–PLMA Polymer Blends 327
15.4 Simvastatin in PEO–PBT Copolymers 337
15.5 Concluding Comments 340
Acknowledgments 341
References 341
Index 342
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