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THE INTERACTION OF MOLECULAR AND ATOMIC OXYGEN WITH SI(100) AND SI(111)
[2025-06-16]

Thomas Engel,
The interaction of molecular and atomic oxygen with Si(100) and Si(111),
Surface Science Reports,
Volume 18, Issue 4,
1993,
Pages 93-144,
ISSN 0167-5729,
https://doi.org/10.1016/0167-5729(93)90016-I.


THE_INTERACTION_OF_MOLECULAR_AND_ATOMIC_OXYGEN_WITH_SI(100)_AND_SI(111).pdf