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CMP for High Mobility Strained SiGe Channels [2025-06-16] |
Sawano, K., Shiraki, Y. & Nakagawa, K. CMP for High Mobility Strained Si/Ge Channels. MRS Online Proceedings Library 1157, 1302 (2008). https://doi.org/10.1557/PROC-1157-E13-02CMP_for_High_Mobility_Strained_SiGe_Channels.pdf |
