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Fast etching of amorphous and microcrystalline silicon by hot-filament gene [2011-12-12] |
| 题目：Fast etching of amorphous and microcrystalline silicon by hot-filament generated atomic hydrogen 作者: Wanka, HN (Wanka, HN); Schubert, MB (Schubert, MB) 编者: Wagner, S; Hack, M; Schiff, EA; Schropp, R; Shimizu, I 来源出版物: AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY - 1997 丛书: MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS 卷: 467 页: 651-656 出版年: 1997 附件下载 |
