徐驰,男,博士,研究员,博士生导师。
1986年生。2008年本科毕业于北京大学物理学院,2013年博士毕业于亚利桑那州立大学物理系。历任亚利桑那州立大学博士后、助理研究科学家、助理研究教授,现任中国科学院半导体研究所研究员,博士生导师。2021年度国家海外高层次引才计划入选者。
取得的重要科研成果及所获奖励:
发展了利用高活性气体源,通过化学气相沉积(CVD)方式外延生长硅-锗-锡类材料的方法,制备了一系列红外光电子器件,并研究了相关的半导体物理问题。
主要研究领域方向:
1、锗锡半导体材料在硅片上的外延生长及其机理研究;
2、硅基红外半导体器件的研制;
3、硅-锗-锡类材料的能带结构、掺杂效应、晶格常数与组分关系研究。
联系方式:
E-mail:chixu@semi.ac.cn
在研/完成项目:
所匹配启动经费,400万元,2021-2026年
面向高性能计算应用的超高带宽光收发芯片及模块, 国家重点研发计划,课题负责人, 633万元,2022-2025年
代表性论文或著作:
(1) Study of strain evolution mechanism in Ge1-xSnx materials grown by low temperature molecular beam epitaxy, Journal of Crystal Growth, 577,126399, 2022, 通讯作者
(2) Extended Compositional Range for the Synthesis of SWIR and LWIR Ge1-ySny Alloys and Device Structures via CVD of SnH4 and Ge3H8, ACS Applied Electronic Materials, 3, 3451, 2021,共同第1作者
(3) Gas source molecular epitaxy of Ge1-ySny materials and devices using high order Ge4H10 and Ge5H12 hydrides, Journal of Vacuum Science & Technology A, 39(6), 063411, 2021, 第1作者
(4) Synthesis and fundamental studies of Si-compatible (Si) GeSn and GeSn mid-IR systems with ultrahigh Sn contents, Chemistry of Materials, 31, 9831-9842, 2019, 通讯作者
(5) Mid-infrared (3–8 μm) Ge1−ySny alloys (0.15 < y < 0.30): Synthesis, structural, and optical properties, Applied Physics Letters, 114, 212104, 2019, 通讯作者
(6) Doping dependence of the optical dielectric function in n-type germanium, Journal of Applied Physics, 125 (8), 085704, 2019, 通讯作者
(7) Fabrication of Ge:Ga Hyperdoped Materials and Devices Using CMOS-Compatible Ga and Ge Hydride Chemistries, ACS Applied Materials & Interfaces, 10 (43), 37198-37206, 2018, 通讯作者
(8) Deviations from Vegard's law in semiconductor thin films measured with X-ray diffraction and Rutherford backscattering: The Ge1-ySny and Ge1-xSix cases, Journal of Applied Physics, 122 (12), 125702, 2017, 第 1 作者
(9) Observation of Phase-Filling Singularities in the Optical Dielectric Function of Highly Doped n-Type Ge, Physical Review Letters, 118 (26), 267402, 2017, 第 1 作者
(10) Ultralow Resistivity Ge: Sb heterostructures on Si Using Hydride Epitaxy of Deuterated Stibine and Trigermane, ACS Applied Materials & Interfaces, 8 (36), 23810–23819, 2016, 通讯作者
(11) Optical properties of Ge-rich Ge1-xSix alloys: Compositional dependence of the lowest direct and indirect gaps, Physical Review B, 93, 125206, 2016, 第 1 作者
(12) Experimental doping dependence of the lattice parameter in n-type Ge: Identifying the correct theoretical framework by comparison with Si, Physical Review B, 93, 041201(R), 2016, 第 1 作者
(13) In situ low temperature As-doping of Ge films using As (SiH3)3 and As (GeH3)3: fundamental properties and device prototypes, Semiconductor Science and Technology, 30, 105028, 2015, 第 1 作者
(14) Compositional dependence of optical interband transition energies in GeSn and GeSiSn alloys, Solid-State Electronics, 110,76-82, 2015, 第 1 作者
(15) Non-conventional routes to SiGe:P/Si (100) materials and devices based on-SiH3 and-GeH3 derivatives of phosphorus: synthesis, electrical performance and optical behavior, Semiconductor Science and Technology, 30, 045007, 2015, 第 1 作者
(16) Frustrated incomplete donor ionization in ultra-low resistivity germanium films, Applied Physics Letters, 105, 232103, 2014, 第 1 作者
(17) Synthesis and optical properties of Sn-rich Ge1-x-ySixSny materials and devices, Thin Solid Films, 557, 177, 2014, 第 1 作者
(18) New strategies for Ge-on-Si materials and devices using non-conventional hydride chemistries: the tetragermane case, Semiconductor Science and Technology, 28, 105001, 2013, 第 1 作者
(19) Optical properties of Ge1-x-ySixSny alloys with y> x: Direct bandgaps beyond 1550 nm, Applied Physics Letters, 103(7), 072111, 2013, 第 1 作者
(20) Molecular synthesis of high-performance near-IR photodetectors with independently tunable structural and optical properties based on Si-Ge-Sn, Journal of the American Chemical Society, 134(51), 20756-20767, 2012, 第 1 作者